Research output per year
Research output per year
Search results
-
2003
Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films
Toivola, Y., Thurn, J., Cook, R. F., Cibuzar, G. & Roberts, K., Nov 15 2003, In: Journal of Applied Physics. 94, 10, p. 6915-6922 8 p.Research output: Contribution to journal › Article › peer-review
72 Scopus citations -
1999
Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology
Roberts, K., Williamson, F., Cibuzar, G. & Thomas, L., Jan 1 1999, In: Biennial University/Government/Industry Microelectronics Symposium - Proceedings. p. 139-141 3 p.Research output: Contribution to journal › Conference article › peer-review
9 Scopus citations