400-900 nm light emitting silicon nanoparticles

R. W. Liptak, X. D. Pi, U. Kortshagen, S. A. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel process has been developed to create silicon nanoparticles (Si-NPs) that emit controlled colors from blue to the near infrared. The emission is reasonably stable in air. This is the first ever report of a process that can produce the full spectrum of visible light from silicon and the first process that creates air-stable blues, greens, and yellows. The particles are created in a nonthermal silane plasma and the resultant aerosol is sent to a second plasma. The process in this chamber involves simultaneously etching and passivating the nanoparticles using a CF4 plasma. The plasma leaves a coating on the surface that prevents the formation of Si=O bonds that are typically seen after air exposure.

Original languageEnglish (US)
Title of host publication2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Pages551-554
Number of pages4
StatePublished - Aug 23 2007
Event2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States
Duration: May 20 2007May 24 2007

Publication series

Name2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Volume4

Other

Other2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
CountryUnited States
CitySanta Clara, CA
Period5/20/075/24/07

Keywords

  • Emission
  • Light
  • Nanoparticle
  • Passivation
  • Silicon

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