An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.
Bibliographical noteFunding Information:
Manuscript received August 11, 2001; revised December 13, 2001. This work was supported by fellowships from the National Science Foundation (NSF) and Automatic RF Techniques Group (ARFTG) and by the NSF (ECS 9996017) and Dupont Educational Aid Grants. The review of this letter was arranged by Associate Editor Dr. Shigeo Kawasaki.
- Coplanar waveguide
- Dielectric constant
- Semiconductor material measurements