A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates

Rebecca L. Peterson, Rhonda F. Drayton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.

Original languageEnglish (US)
Title of host publication57th ARFTG Conference Digest Spring 2001
Subtitle of host publicationBest Practices and Strategies for RF Test, ARFTG Spring 2001
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780356861, 9780780356863
DOIs
StatePublished - 2001
Event57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 - Phoenix, United States
Duration: May 25 2001 → …

Publication series

Name57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001

Other

Other57th Automatic RF Techniques Group Conference, ARFTG Spring 2001
Country/TerritoryUnited States
CityPhoenix
Period5/25/01 → …

Bibliographical note

Funding Information:
The authors thank Daniel Amey of DuPont for his support and assistance. This work has been supported by an Automatic RF Techniques Group (ARFTG) Microwave Measurement Student Fellowship, a National Science Foundation Graduate Fellowship, and a Dupont Educational Aid Grant.

Publisher Copyright:
© 2001 IEEE.

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