The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.
|Original language||English (US)|
|Title of host publication||57th ARFTG Conference Digest Spring 2001|
|Subtitle of host publication||Best Practices and Strategies for RF Test, ARFTG Spring 2001|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|ISBN (Electronic)||0780356861, 9780780356863|
|State||Published - 2001|
|Event||57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 - Phoenix, United States|
Duration: May 25 2001 → …
|Name||57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001|
|Other||57th Automatic RF Techniques Group Conference, ARFTG Spring 2001|
|Period||5/25/01 → …|
Bibliographical noteFunding Information:
The authors thank Daniel Amey of DuPont for his support and assistance. This work has been supported by an Automatic RF Techniques Group (ARFTG) Microwave Measurement Student Fellowship, a National Science Foundation Graduate Fellowship, and a Dupont Educational Aid Grant.
© 2001 IEEE.