Abstract
The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.
Original language | English (US) |
---|---|
Title of host publication | 57th ARFTG Conference Digest Spring 2001 |
Subtitle of host publication | Best Practices and Strategies for RF Test, ARFTG Spring 2001 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 0780356861, 9780780356863 |
DOIs | |
State | Published - 2001 |
Event | 57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 - Phoenix, United States Duration: May 25 2001 → … |
Publication series
Name | 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001 |
---|
Other
Other | 57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 |
---|---|
Country/Territory | United States |
City | Phoenix |
Period | 5/25/01 → … |
Bibliographical note
Funding Information:The authors thank Daniel Amey of DuPont for his support and assistance. This work has been supported by an Automatic RF Techniques Group (ARFTG) Microwave Measurement Student Fellowship, a National Science Foundation Graduate Fellowship, and a Dupont Educational Aid Grant.
Publisher Copyright:
© 2001 IEEE.