A global model of chemical vapor deposition of silicon dioxide by direct-current corona discharges in dry air containing octamethylcyclotetrasiloxane vapor

Physics & Astronomy

• electric corona 75%
• coronas 62%
• direct current 49%
• vapor deposition 48%
• silicon dioxide 48%
• vapors 47%
• Peclet number 38%
• air 37%
• chemistry 27%
• wire 23%
• oxygen 18%
• particle charging 16%
• silicones 11%
• electron distribution 11%
• low currents 11%
• ozone 11%
• molecules 11%
• polarity 9%
• mass transfer 9%
• vapor phases 8%
• radii 6%
• coefficients 5%
• performance 4%
• electrons 4%

Engineering & Materials Science

• Deposition rates 80%
• Chemical vapor deposition 73%
• Peclet number 65%
• Vapors 56%
• Oxygen 38%
• Wire 35%
• Air 34%
• Electrons 31%
• Molecules 30%
• Surface chemistry 20%
• Ozone 19%
• Silicones 17%
• Strength of materials 16%
• Plasmas 14%
• Mass transfer 14%
• Gases 8%
• Experiments 5%

Chemical Compounds

• Peclet Number 100%
• Octamethylcyclotetrasiloxane 94%
• Silicon Dioxide 76%
• Chemical Vapour Deposition 56%
• Velocity 52%
• Dioxygen 30%
• Electron Configuration 25%
• Chemistry 24%
• Surface Chemistry 19%
• Mass Transfer 17%
• Polarity 17%
• Strength 13%
• Plasma 13%
• Electron Particle 11%
• Molecule 7%