TY - GEN
T1 - A high resolution on-chip beat frequency detection system for measuring BTI, HCI, and TDDB
AU - Keane, John
AU - Wang, Xiaofei
AU - Persaud, Devin
AU - Kim, Chris H.
PY - 2010/8/20
Y1 - 2010/8/20
N2 - We present an on-chip reliability monitor capable of separating the aging effects of Hot Carrier Injection (HCI), Bias Temperature Instability (BTI), and Time Dependent Dielectric Breakdown (TDDB) with high frequency resolution. Sub-μs measurements are controlled by on-chip logic in order to avoid excessive unwanted BTI recovery during stress interruptions. Frequency shift measurement resolution of down to the error floor of 0.07% is achieved during these short interruptions using a beat frequency detection system, and we automate the experiments through a simple digital interface. Measurement results are presented from a 65 nm test chip.
AB - We present an on-chip reliability monitor capable of separating the aging effects of Hot Carrier Injection (HCI), Bias Temperature Instability (BTI), and Time Dependent Dielectric Breakdown (TDDB) with high frequency resolution. Sub-μs measurements are controlled by on-chip logic in order to avoid excessive unwanted BTI recovery during stress interruptions. Frequency shift measurement resolution of down to the error floor of 0.07% is achieved during these short interruptions using a beat frequency detection system, and we automate the experiments through a simple digital interface. Measurement results are presented from a 65 nm test chip.
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U2 - 10.1109/ICICDT.2010.5510268
DO - 10.1109/ICICDT.2010.5510268
M3 - Conference contribution
AN - SCOPUS:77955640608
SN - 9781424457748
T3 - 2010 IEEE International Conference on Integrated Circuit Design and Technology, ICICDT 2010
SP - 142
EP - 145
BT - 2010 IEEE International Conference on Integrated Circuit Design and Technology, ICICDT 2010
T2 - 2010 IEEE International Conference on Integrated Circuit Design and Technology, ICICDT 2010
Y2 - 2 June 2010 through 4 June 2010
ER -