A micromachined chemical sensor for sea floor environments: Initial results

Tao Li, Kang Ding, William E. Seyfried, Yogesh B. Gianchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper reports a micromachined chemical sensor intended for harsh environments such as those near hydrothermal vents at the sea floor. The sensor is intended to measure the pH, dissolved H2 and H2S, and temperature. The device is 12 mm in diameter and 6 mm in effective length, including packaging. A YSZ|HgO|Hg solid electrode is used as a common electrode for measurement of the three chemical quantities. The YSZ diaphragm used for this electrode is <500 μm thick, allowing sufficient ion conductance at temperatures >35°C. The other electrodes are thin-film metal electrodes fabricated on the same YSZ diaphragm: an Ag/AgCl reference electrode for pH sensing, an Ag/Ag2S electrode for H2S sensing, and a Pt electrode for H2 sensing. The two temperature sensors are thin film Pt resistors. Initial tests have been performed to test the functionality of the pH and H2S sensors; measurements are in line with expectations.

Original languageEnglish (US)
Title of host publication2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
EditorsMehran Mehregany, David J. Monk
PublisherTransducer Research Foundation
Pages173-176
Number of pages4
ISBN (Electronic)9780964002494
DOIs
StatePublished - 2012
Event2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States
Duration: Jun 3 2012Jun 7 2012

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Other

Other2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
CountryUnited States
CityHilton Head
Period6/3/126/7/12

Bibliographical note

Publisher Copyright:
© 2012 TRF.

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