Abstract
An earlier system for voltage measurement in the scanning electron microscope (SEM) used a hemispherical retarding field analyser comprising two grids and a solid outer collector. A new electron energy analyser is described which uses two extra grids in place in the solid hemisphere, and thus allows high-energy backscattered primary electrons to escape from the analyser. This modification enables an image of the specimen to be easily obtained and, in conjunction with a modified feedback control loop, reduces the magnitude of the unwanted topographic and compositional contrast signals. The performance of the voltage measurement system using this 'four-grid' analyser is discussed and compared with that obtained from the solid hemisphere analyser.
Original language | English (US) |
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Article number | 024 |
Pages (from-to) | 660-663 |
Number of pages | 4 |
Journal | Journal of Physics E: Scientific Instruments |
Volume | 10 |
Issue number | 6 |
DOIs | |
State | Published - Dec 1 1977 |