A new probe of metallization microstructure on semiconductor surfaces

G. Haugstad, A. Raisanen, L. Sorba, L. Vanzetti, X. Yu, A. Franciosi

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

Synchrotron radiation photoemission spectroscopy studies of the Xe 4d core level emission from Xe atoms physisorbed on unreactive Yb-GaAs(110) and reactive Yb-Hg1-xCdxTe(110) interfaces allowed us to detect the presence of metallic islands and follow the coverage-dependent evolution of island composition and morphology. Measurements of local island work function, and local work function of the semiconductor surface between the islands can be performed if the ionization energy of the adsorbed Xe atoms is known a priori. We conducted systematic studies of Xe physisorption on a variety of elemental metallic films and cleaved semiconductor substrates, and found that the 4d ionization energy of the first layer Xe atoms physisorbed on metals is relatively constant (65.7 ± 0.1 eV). On cleaved semiconductor surfaces the apparent 4d ionization energy for Xe atoms adsorbed in the first of two physisorption sites is also relatively constant, but 0.6 eV higher than that observed on metals.

Original languageEnglish (US)
Pages (from-to)2415-2422
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume9
Issue number4
DOIs
StatePublished - Jul 1 1991
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 1991 American Vacuum Society.

Keywords

  • (HgCd)Te
  • Adsorption
  • Cadmium tellurides
  • Core levels
  • GaAs
  • Gallium arsenides
  • Interface phenomena
  • Ionization potential
  • Islands
  • Mercury tellurides
  • Microstructure
  • Photoelectron spectroscopy
  • Sorptive properties
  • Synchrotron radiation
  • Ultrahigh vacuum
  • Work functions
  • Xenon
  • YB
  • Ytterbium

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