A side-by-side comparison of the TiO2 deposition kinetics and the corresponding film microstructures using titanium(IV) isopropoxide and anhydrous titanium(IV) nitrate was conducted at low pressures (< ICH Torr) in an ultrahigh vacuum chemical vapor deposition reactor. Titanium(IV) nitrate exhibited a lower activation energy of reaction (Er = 98 kJ/mol) which allowed deposition at lower temperatures compared to titanium(IV) isopropoxide (Er = 135 kJ/mol). Comparison of the microstructures of films deposited at similar temperatures revealed significant differences in the reaction rate limited kinetic regime. As the growth rates of the two precursors converged in the flux-limited regime, the respective microstructures became indistinguishable.
|Original language||English (US)|
|Title of host publication||Materials Research Society Symposium - Proceedings|
|Number of pages||6|
|State||Published - 1999|