A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage

Won Ho Choi, Saroj Satapathy, John Keane, Chris H. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

We propose a test circuit for characterizing Plasma-Induced Damage (PID) based on a ring oscillator array for collecting high-quality BTI statistics. Two types of ring oscillators, PID protected and PID damaged, with built-in antenna structures were designed to separate PID from other effects. A beat frequency (BF) detection scheme was adopted to achieve high frequency measurement precision (>0.01%) in a short measurement time (>1μs) to prevent unwanted BTI recovery. The proposed circuit enables accurate PID-induced BTI lifetime prediction with different Antenna Ratios (ARs) in any type of device with any topology of antenna structure under any fabrication process. Measured frequency statistics from a 65nm test chip shows a 1.15% shift in the average frequency as a result of PID.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479932863
DOIs
StatePublished - Nov 4 2014
Event36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014 - San Jose, United States
Duration: Sep 15 2014Sep 17 2014

Publication series

NameProceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014

Other

Other36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014
CountryUnited States
CitySan Jose
Period9/15/149/17/14

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