A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Min Woo Jang; Chia Ling Chen; Walter E. Partlo; Shruti R. Patil; Dongjin Lee; Zhijiang Ye; David Lilja; T. Andrew Taton; Tianhong Cui; Stephen A. Campbell

doi:10.1109/TRANSDUCERS.2011.5969607

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Min Woo Jang, Chia Ling Chen, Walter E. Partlo, Shruti R. Patil, Dongjin Lee, Zhijiang Ye, David Lilja, T. Andrew Taton, Tianhong Cui, Stephen A. Campbell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.

Original language	English (US)
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1705-1708
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969607
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	6/5/11 → 6/9/11

Keywords

3-terminal fixed-fixed beam switch
All-SWNT thin film
Layer-by-layer assembly

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10.1109/TRANSDUCERS.2011.5969607

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Jang, M. W., Chen, C. L., Partlo, W. E., Patil, S. R., Lee, D., Ye, Z., Lilja, D., Taton, T. A., Cui, T., & Campbell, S. A. (2011). A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1705-1708). Article 5969607 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969607

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. / Jang, Min Woo; Chen, Chia Ling; Partlo, Walter E. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708 5969607 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jang, MW, Chen, CL, Partlo, WE, Patil, SR, Lee, D, Ye, Z, Lilja, D, Taton, TA, Cui, T & Campbell, SA 2011, A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969607, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1705-1708, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969607

Jang MW, Chen CL, Partlo WE, Patil SR, Lee D, Ye Z et al. A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708. 5969607. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969607

Jang, Min Woo ; Chen, Chia Ling ; Partlo, Walter E. et al. / A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1705-1708 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

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abstract = "An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.",

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A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

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