A transmission electron microscopy study of the deformation behavior underneath nanoindents in nanoscale Al-TiN multilayered composites

D. Bhattacharyya; N. A. Mara; P. Dickerson; R. G. Hoagland; A. Misra

doi:10.1080/14786430903459691

A transmission electron microscopy study of the deformation behavior underneath nanoindents in nanoscale Al-TiN multilayered composites

D. Bhattacharyya, N. A. Mara, P. Dickerson, R. G. Hoagland, A. Misra

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

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Abstract

Nanoscale multilayered Al-TiN composites were deposited using the dc magnetron sputtering technique in two different layer thickness ratios, Al : TiN = 1 : 1 and Al : TiN = 9 : 1. The Al layer thickness varied from 2 nm to 450 nm. The hardness of the samples was tested by nanoindentation using a Berkovich tip. Cross-sectional transmission electron microscopy (TEM) was carried out on samples extracted with focused ion beam from below the nanoindents. The results of the hardness tests on the Al-TiN multilayers with two different thickness ratios are presented, together with observations from the cross-sectional TEM studies of the regions underneath the indents. These studies revealed remarkable strength in the multilayers, as well as some very interesting deformation behavior in the TiN layers at extremely small length scales, where the hard TiN layers undergo co-deformation with the Al layers.

Original language	English (US)
Pages (from-to)	1711-1724
Number of pages	14
Journal	Philosophical Magazine
Volume	90
Issue number	13
DOIs	https://doi.org/10.1080/14786430903459691
State	Published - May 2010

Bibliographical note

Funding Information:
The authors would like to acknowledge the support of the Office of Basic Energy Sciences of the Department of Energy, United States Government. The help and technical expertise of J.K. Baldwin in the deposition of the thin films is also gratefully acknowledged.

Keywords

Focused ion beam
Multilayer
Nanocomposite
Nanoindentation
Nanomechanics
Transmission electron microscopy

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title = "A transmission electron microscopy study of the deformation behavior underneath nanoindents in nanoscale Al-TiN multilayered composites",

abstract = "Nanoscale multilayered Al-TiN composites were deposited using the dc magnetron sputtering technique in two different layer thickness ratios, Al : TiN = 1 : 1 and Al : TiN = 9 : 1. The Al layer thickness varied from 2 nm to 450 nm. The hardness of the samples was tested by nanoindentation using a Berkovich tip. Cross-sectional transmission electron microscopy (TEM) was carried out on samples extracted with focused ion beam from below the nanoindents. The results of the hardness tests on the Al-TiN multilayers with two different thickness ratios are presented, together with observations from the cross-sectional TEM studies of the regions underneath the indents. These studies revealed remarkable strength in the multilayers, as well as some very interesting deformation behavior in the TiN layers at extremely small length scales, where the hard TiN layers undergo co-deformation with the Al layers.",

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author = "D. Bhattacharyya and Mara, {N. A.} and P. Dickerson and Hoagland, {R. G.} and A. Misra",

note = "Funding Information: The authors would like to acknowledge the support of the Office of Basic Energy Sciences of the Department of Energy, United States Government. The help and technical expertise of J.K. Baldwin in the deposition of the thin films is also gratefully acknowledged.",

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AU - Bhattacharyya, D.

AU - Mara, N. A.

AU - Dickerson, P.

AU - Hoagland, R. G.

AU - Misra, A.

N1 - Funding Information: The authors would like to acknowledge the support of the Office of Basic Energy Sciences of the Department of Energy, United States Government. The help and technical expertise of J.K. Baldwin in the deposition of the thin films is also gratefully acknowledged.

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Y1 - 2010/5

N2 - Nanoscale multilayered Al-TiN composites were deposited using the dc magnetron sputtering technique in two different layer thickness ratios, Al : TiN = 1 : 1 and Al : TiN = 9 : 1. The Al layer thickness varied from 2 nm to 450 nm. The hardness of the samples was tested by nanoindentation using a Berkovich tip. Cross-sectional transmission electron microscopy (TEM) was carried out on samples extracted with focused ion beam from below the nanoindents. The results of the hardness tests on the Al-TiN multilayers with two different thickness ratios are presented, together with observations from the cross-sectional TEM studies of the regions underneath the indents. These studies revealed remarkable strength in the multilayers, as well as some very interesting deformation behavior in the TiN layers at extremely small length scales, where the hard TiN layers undergo co-deformation with the Al layers.

AB - Nanoscale multilayered Al-TiN composites were deposited using the dc magnetron sputtering technique in two different layer thickness ratios, Al : TiN = 1 : 1 and Al : TiN = 9 : 1. The Al layer thickness varied from 2 nm to 450 nm. The hardness of the samples was tested by nanoindentation using a Berkovich tip. Cross-sectional transmission electron microscopy (TEM) was carried out on samples extracted with focused ion beam from below the nanoindents. The results of the hardness tests on the Al-TiN multilayers with two different thickness ratios are presented, together with observations from the cross-sectional TEM studies of the regions underneath the indents. These studies revealed remarkable strength in the multilayers, as well as some very interesting deformation behavior in the TiN layers at extremely small length scales, where the hard TiN layers undergo co-deformation with the Al layers.

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KW - Nanoindentation

KW - Nanomechanics

KW - Transmission electron microscopy

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A transmission electron microscopy study of the deformation behavior underneath nanoindents in nanoscale Al-TiN multilayered composites

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