Reflection coefficients of silicon wafers in megasonic cleaning tanks have been determined theoretically and experimentally. The experimental results obtained indicate that the model of layered solid in liquids is a good predictor of reflection coefficients for silicon wafers in liquids. At frequency of about 1 MHz, high reflection from silicon wafers occurs at large incident angles. There are also two troughs of low reflection for incident angles between 0°-90°. The Young's modulus and Poisson's ratio of the Silicon (110) orientation give the best agreement between the model and experimental results.
|Original language||English (US)|
|Number of pages||4|
|Journal||Proceedings of the IEEE Ultrasonics Symposium|
|State||Published - Dec 1 1997|