Abstract
Reflection coefficients of silicon wafers in megasonic cleaning tanks have been determined theoretically and experimentally. The experimental results obtained indicate that the model of layered solid in liquids is a good predictor of reflection coefficients for silicon wafers in liquids. At frequency of about 1 MHz, high reflection from silicon wafers occurs at large incident angles. There are also two troughs of low reflection for incident angles between 0°-90°. The Young's modulus and Poisson's ratio of the Silicon (110) orientation give the best agreement between the model and experimental results.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 833-836 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| State | Published - 1997 |
| Event | Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can Duration: Oct 5 1997 → Oct 8 1997 |