Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran; Mo Li; Daniel Garcia-Sanchez; Peng Zhao; Ichiro Takeuchi; Hong X. Tang

doi:10.1063/1.3533390

Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran, Mo Li, Daniel Garcia-Sanchez, Peng Zhao, Ichiro Takeuchi, Hong X. Tang

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

We report the piezoresistivity in magnetic thin films of Fe_0.7 Ga_0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe_0.7 Ga _0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

Original language	English (US)
Article number	013502
Journal	Applied Physics Letters
Volume	98
Issue number	1
DOIs	https://doi.org/10.1063/1.3533390
State	Published - Jan 3 2011

Bibliographical note

Funding Information:
The authors acknowledge funding from DARPA/DSO’s HUMS project under Grant No. FA8650-09-C-1-7944.

Access

10.1063/1.3533390

OpenUrl availability

Full text

Cite this

@article{cd86609bcbdd48699b48977537d4b11d,

title = "Active microcantilevers based on piezoresistive ferromagnetic thin films",

abstract = "We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.",

author = "Harish Bhaskaran and Mo Li and Daniel Garcia-Sanchez and Peng Zhao and Ichiro Takeuchi and Tang, {Hong X.}",

note = "Funding Information: The authors acknowledge funding from DARPA/DSO{\textquoteright}s HUMS project under Grant No. FA8650-09-C-1-7944. ",

year = "2011",

month = jan,

day = "3",

doi = "10.1063/1.3533390",

language = "English (US)",

volume = "98",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}

TY - JOUR

T1 - Active microcantilevers based on piezoresistive ferromagnetic thin films

AU - Bhaskaran, Harish

AU - Li, Mo

AU - Garcia-Sanchez, Daniel

AU - Zhao, Peng

AU - Takeuchi, Ichiro

AU - Tang, Hong X.

N1 - Funding Information: The authors acknowledge funding from DARPA/DSO’s HUMS project under Grant No. FA8650-09-C-1-7944.

PY - 2011/1/3

Y1 - 2011/1/3

N2 - We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

AB - We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

UR - http://www.scopus.com/inward/record.url?scp=78651278318&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78651278318&partnerID=8YFLogxK

U2 - 10.1063/1.3533390

DO - 10.1063/1.3533390

M3 - Article

AN - SCOPUS:78651278318

SN - 0003-6951

VL - 98

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

M1 - 013502

ER -

Active microcantilevers based on piezoresistive ferromagnetic thin films

Abstract

Bibliographical note

Access

OpenUrl availability

Other files and links

Fingerprint

Cite this