Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran, Mo Li, Daniel Garcia-Sanchez, Peng Zhao, Ichiro Takeuchi, Hong X. Tang

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

Original languageEnglish (US)
Article number013502
JournalApplied Physics Letters
Volume98
Issue number1
DOIs
StatePublished - Jan 3 2011

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