TY - JOUR
T1 - Adhesion energy of few layer graphene characterized by atomic force microscope
AU - Li, Peng
AU - You, Zheng
AU - Cui, Tianhong
PY - 2014/9/15
Y1 - 2014/9/15
N2 - This paper presents a generic approach to characterize and analyze the adhesion energy between graphene and different materials using nanoindentation of an atomic force microscope (AFM), which is extremely essential and critical for variety of graphene based micro- and nano-devices. AFM was used to press a free-standing graphene beam down to a substrate. During the retraction, the adhesion force (named as the secondary pull-off force) was measured to analyze the adhesion energy between the graphene beam and the substrate. This approach is easy for manipulation and it can detect the adhesion energy after the device fabrication. According to our measurement, the graphene/SiO2, graphene/gold, and graphene/graphene adhesion energies per area are approximately 270 mJ/m2, 255 mJ/m2, and 307 mJ/m 2, respectively. This result was used to predict the performances and guide the design of graphene M/NEMS devices.
AB - This paper presents a generic approach to characterize and analyze the adhesion energy between graphene and different materials using nanoindentation of an atomic force microscope (AFM), which is extremely essential and critical for variety of graphene based micro- and nano-devices. AFM was used to press a free-standing graphene beam down to a substrate. During the retraction, the adhesion force (named as the secondary pull-off force) was measured to analyze the adhesion energy between the graphene beam and the substrate. This approach is easy for manipulation and it can detect the adhesion energy after the device fabrication. According to our measurement, the graphene/SiO2, graphene/gold, and graphene/graphene adhesion energies per area are approximately 270 mJ/m2, 255 mJ/m2, and 307 mJ/m 2, respectively. This result was used to predict the performances and guide the design of graphene M/NEMS devices.
KW - Adhesion energy
KW - Graphene
KW - MEMS
KW - RF switch
UR - http://www.scopus.com/inward/record.url?scp=84905584560&partnerID=8YFLogxK
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U2 - 10.1016/j.sna.2014.06.010
DO - 10.1016/j.sna.2014.06.010
M3 - Article
AN - SCOPUS:84905584560
VL - 217
SP - 56
EP - 61
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
ER -