Aligned dense single-walled carbon nanotube beams and cantilevers for nanoelectromechanical systems applications

Miao Lu, Min Woo Jang, Stephen A. Campbell, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

A processable approach to fabricate suspended and aligned single-walled carbon nanotube (SWNT) beams and cantilevers is presented in this article. Suspended dense SWNT membranes were aligned and deposited by a controlled dielectrophoresis process. A gallium focused ion beam at 30 keV and 50 pA with an optimized dose bombarded the SWNT membranes to prepare them for suspended nanoscale beams and cantilevers. To demonstrate the application of this process to nanoelectromechanical systems (NEMS), an SWNT switch was realized with a pull-in voltage of ∼7.8 V. Accordingly, the fabrication process of SWNT beams and cantilevers is believed to be very promising for prototyping of many NEMS devices such as switches, resonators, and biosensors.

Original languageEnglish (US)
Pages (from-to)522-526
Number of pages5
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume28
Issue number3
DOIs
StatePublished - May 2010

Bibliographical note

Funding Information:
This work was partially sponsored by the DARPA NEMS Program through SPAWAR Grant No. N66001–07–1–2060. The authors also acknowledge the fabrication and characterization assistance at the Nanofabrication Center and the Characterization Facility at the University of Minnesota, Minneapolis, supported by NSF through NNIN Grant No. ECS-0335765.

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