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Abstract
Ambipolar black phosphorus MOSFETs with record n-channel extrinsic transconductance are reported. The devices consist of multilayer black phosphorus aligned to a local back-gate electrode with 10-nm-thick HfO2 gate dielectric. Before passivation, devices with 0.3-μm gate length behaved as p-MOSFETs with peak extrinsic transconductance, gm, of 282 μS/μm at VDS=-2 V. After passivation, the same devices displayed the ambipolar behavior, and when tested as n-MOSFETs, had peak gm =66 μS/μm at VDS = +2 V, and similar devices on the same wafer had gm as high as 80 μS/μm. These results are an important step toward the realization of high-performance black phosphorus complementary logic circuits.
Original language | English (US) |
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Article number | 7323815 |
Pages (from-to) | 103-106 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 37 |
Issue number | 1 |
DOIs | |
State | Published - Jan 2016 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Dielectrics
- Logic gates
- MOSFET
- MOSFET circuits
- Passivation
- Phosphorus
- Transconductance
How much support was provided by MRSEC?
- Primary
Reporting period for MRSEC
- Period 2
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MRSEC IRG-1: Electrostatic Control of Materials
Leighton, C., Birol, T., Fernandes, R. M., Frisbie, D., Goldman, A. M., Greven, M., Jalan, B., Koester, S. J., He, T., Jeong, J. S., Koirala, S., Paul, A., Thoutam, L. R. & Yu, G.
9/1/98 → …
Project: Research project
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