Analysis of micromachined PZT membranes for MEMS power

J. H. Cho, M. J. Anderson, R. F. Richards, D. F. Bahr, C. D. Richards

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Analysis of micromachined PZT membranes for MEMS power'. Together they form a unique fingerprint.

Engineering & Materials Science