Annealing effects of tantalum thin films sputtered on [001] silicon substrate

Ling Liu, Hao Gong, Yue Wang, Jianping Wang, A. T.S. Wee, Rong Liu

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Fingerprint

Dive into the research topics of 'Annealing effects of tantalum thin films sputtered on [001] silicon substrate'. Together they form a unique fingerprint.

Engineering & Materials Science

Medicine & Life Sciences

Physics & Astronomy

Chemical Compounds