@article{020a4f94ef5742a3a68c2ecb1aa6b7b1,
title = "Application of particle beam mass spectrometry to aerosol formation and transport in silane LPCVD",
keywords = "Chemical Vapor Deposition, Contamination Control, Semiconductor Processing, Silicon, Thermophoresis",
author = "S. Nijhawan and Rao, {N. P.} and Mcmurry, {P. H.} and Campbell, {S. A.} and Brockmann, {J. E.}",
year = "1998",
month = sep,
doi = "10.1016/S0021-8502(98)00124-4",
language = "English (US)",
volume = "29",
pages = "S81--S82",
journal = "Journal of Aerosol Science",
issn = "0021-8502",
publisher = "Elsevier Limited",
number = "SUPPL 1",
}