Abstract
The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.
Original language | English (US) |
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Pages (from-to) | 161-164 |
Number of pages | 4 |
Journal | IEEE MTT-S International Microwave Symposium Digest |
Volume | 1 |
State | Published - Jun 1992 |
Event | 1992 IEEE MTT-S International Microwave Symposium Digest Part 2 (of 3) - Albuquerque, NM, USA Duration: Jun 1 1992 → Jun 5 1992 |