Atomic-scale analysis of deposition and characterization of a-Si:H thin films grown from SiH radical precursor

Saravanapriyan Sriraman, Eray S. Aydil, Dimitrios Maroudas

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Atomic-scale analysis of deposition and characterization of a-Si:H thin films grown from SiH radical precursor'. Together they form a unique fingerprint.

Physics & Astronomy