Block copolymers for DSA in the 100 Å regime

C. Grant Willson, Gregory Blachut, Michael J. Maher, William J. Durand, Christopher M. Bates, Matthew C. Carlson, Jeffrey L. Self, Austin P. Lane, Yusuke Asano, Stephen Sirard, Colin O. Hayes, Christopher J. Ellison

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Engineering & Materials Science

Chemical Compounds