Abstract
The undesirable production of secondary neutrons by cancer-radiotherapy linear accelerators (linac) has been demonstrated to cause soft errors in nearby electronics through the 10B(n, a) 7Li reaction. 10B is a component in the BPSG used as a dielectric material in some integrated-circuit (IC) fabrication processes.
Original language | English (US) |
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Pages (from-to) | 449-451 |
Number of pages | 3 |
Journal | IEEE Transactions on Device and Materials Reliability |
Volume | 5 |
Issue number | 3 |
DOIs | |
State | Published - Sep 2005 |
Externally published | Yes |
Keywords
- BPSG
- Biomedical applications of radiation
- Boron
- Integrated circuit radiation effects
- Neutron radiation effects
- Radiotherapy
- Single event upset
- Soft errors