Carrier mobility enhancement in strained Si-On-Insulator fabricated by wafer bonding

L. J. Huang, J. O. Chu, S. Goma, C. P. D'Emic, S. J. Koester, D. F. Canaperi, P. M. Mooney, S. A. Cordes, J. L. Speidell, R. M. Anderson, H. S. Philip Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

41 Scopus citations

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