Chapter 12 Hydrogen Diffusion in Amorphous Silicon

Engineering & Materials Science

• Amorphous silicon 100%
• Hydrogen 58%
• Film growth 38%
• Glow discharges 18%
• Defect density 17%
• Defects 16%
• Silanes 15%
• Glass 9%
• Decomposition 8%

Chemical Compounds

• Amorphous Silicon 99%
• Diffusion 45%
• Hydrogen 37%
• Glow Discharge 14%
• Liquid Film 11%
• Conductance 11%
• Silane 11%
• Diffusion Coefficient 10%
• Decomposition 7%

Physics & Astronomy

• amorphous silicon 67%
• hydrogen 45%
• defects 20%
• silanes 13%
• glow discharges 12%
• proposals 11%
• radio frequencies 10%
• diffusion coefficient 9%
• decomposition 9%
• glass 7%