Abstract
The device design and characteristics of sub-100 nm strained Si N- and PMOSFETs were discussed. A enhancement of 110% was observed in the strained Si devices with 1.2% tensile strain, along with a 45% increase in the peak hole mobility. A comparison of current-voltage characteristics of 100 nm PFETs was done. The strained Si (SS) PFETs showed comparable subthreshold characteristics while showing higher current drive.
Original language | English (US) |
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Pages | 98-99 |
Number of pages | 2 |
State | Published - 2002 |
Event | 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, United States Duration: Jun 11 2002 → Jun 13 2002 |
Other
Other | 2002 Symposium on VLSI Technology Digest of Technical Papers |
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Country/Territory | United States |
City | Honolulu, HI |
Period | 6/11/02 → 6/13/02 |