Characterization of MEMS actuators VIA nanoindentation

D. E. Glumac; R. N. Rizq; W. P. Robbins; D. L. Polla; J. C. Nelson

Characterization of MEMS actuators VIA nanoindentation

D. E. Glumac, R. N. Rizq, W. P. Robbins, D. L. Polla, J. C. Nelson

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.

Original language	English (US)
Title of host publication	Electronic Packaging Materials Science VII
Editors	Peter Borgesen, Klavs F. Jensen, Roger A. Pollak
Publisher	Publ by Materials Research Society
Pages	419-424
Number of pages	6
ISBN (Print)	1558992227
State	Published - 1994
Event	Proceedings of the Fall 1993 MRS Meeting - Boston, MA, USA Duration: Nov 29 1993 → Dec 3 1993

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	323
ISSN (Print)	0272-9172

Other

Other	Proceedings of the Fall 1993 MRS Meeting
City	Boston, MA, USA
Period	11/29/93 → 12/3/93

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Characterization of MEMS actuators VIA nanoindentation. / Glumac, D. E.; Rizq, R. N.; Robbins, W. P. et al.
Electronic Packaging Materials Science VII. ed. / Peter Borgesen; Klavs F. Jensen; Roger A. Pollak. Publ by Materials Research Society, 1994. p. 419-424 (Materials Research Society Symposium Proceedings; Vol. 323).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Glumac, DE, Rizq, RN, Robbins, WP, Polla, DL & Nelson, JC 1994, Characterization of MEMS actuators VIA nanoindentation. in P Borgesen, KF Jensen & RA Pollak (eds), Electronic Packaging Materials Science VII. Materials Research Society Symposium Proceedings, vol. 323, Publ by Materials Research Society, pp. 419-424, Proceedings of the Fall 1993 MRS Meeting, Boston, MA, USA, 11/29/93.

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ER -

Characterization of MEMS actuators VIA nanoindentation

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