Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

Yoshihide Senzaki, Wayne L. Gladfelter, Fred B. McCormick

Research output: Contribution to journalArticlepeer-review

18 Scopus citations
Original languageEnglish (US)
Pages (from-to)747-749
Number of pages3
JournalChemistry of Materials
Volume4
Issue number4
DOIs
StatePublished - Feb 1 1992

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