Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, Wolfgang Rudolph

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The laser damage behavior of high quality coatings under nanosecond pulse illumination is controlled by statistically distributed defects, whose physical nature and defect mechanisms are still largely unknown. Defect densities are often retrieved by modeling the fluence dependence of the damage probability measured by traditional damage test (TDT) methods, based on âdamage' or âño damage' observations. STEREO-LID (Spatioorally REsolved Optical LaserInduced Damage) allows the determination of the damage fluence (and intensity) in a single test by identifying the initiation of damage both temporally and spatially. The advantages of this test method over the TDT are discussed. In particular, its ability to retrieve detailed defect distribution functions is demonstrated by comparison of results from HfO2 films prepared by ion-assisted electron beam evaporation, ion-beam sputtering, and atomic layer deposition.

Original languageEnglish (US)
Title of host publication47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
Subtitle of host publication2015
EditorsM.J. Soileau, Vitaly E. Gruzdev, Joseph A. Menapace, Detlev Ristau, Gregory J. Exarhos
PublisherSPIE
ISBN (Electronic)9781628418323
DOIs
StatePublished - Jan 1 2015
Event47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015 - Boulder, United States
Duration: Sep 27 2015Sep 30 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9632
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015
CountryUnited States
CityBoulder
Period9/27/159/30/15

Keywords

  • Laser-induced damage threshold
  • defect distribution
  • optical coatings

Fingerprint Dive into the research topics of 'Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films'. Together they form a unique fingerprint.

Cite this