Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu; Amir Khabbazi; Travis Day; Andrew Brown; Luke A. Emmert; Joseph J. Talghader; Ella Field; Damon Kletecka; John Bellum; Dinesh Patel; Carmen S. Menoni; Wolfgang Rudolph

doi:10.1117/12.2196548

Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, Wolfgang Rudolph

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

The laser damage behavior of high quality coatings under nanosecond pulse illumination is controlled by statistically distributed defects, whose physical nature and defect mechanisms are still largely unknown. Defect densities are often retrieved by modeling the fluence dependence of the damage probability measured by traditional damage test (TDT) methods, based on âdamage' or âño damage' observations. STEREO-LID (Spatioorally REsolved Optical LaserInduced Damage) allows the determination of the damage fluence (and intensity) in a single test by identifying the initiation of damage both temporally and spatially. The advantages of this test method over the TDT are discussed. In particular, its ability to retrieve detailed defect distribution functions is demonstrated by comparison of results from HfO₂ films prepared by ion-assisted electron beam evaporation, ion-beam sputtering, and atomic layer deposition.

Original language	English (US)
Title of host publication	47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
Subtitle of host publication	2015
Editors	M.J. Soileau, Vitaly E. Gruzdev, Joseph A. Menapace, Detlev Ristau, Gregory J. Exarhos
Publisher	SPIE
ISBN (Electronic)	9781628418323
DOIs	https://doi.org/10.1117/12.2196548
State	Published - 2015
Event	47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015 - Boulder, United States Duration: Sep 27 2015 → Sep 30 2015

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9632
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015
Country/Territory	United States
City	Boulder
Period	9/27/15 → 9/30/15

Bibliographical note

Publisher Copyright:
© 2015 SPIE.

Keywords

Laser-induced damage threshold
defect distribution
optical coatings

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Xu, Y., Khabbazi, A., Day, T., Brown, A., Emmert, L. A., Talghader, J. J., Field, E., Kletecka, D., Bellum, J., Patel, D., Menoni, C. S., & Rudolph, W. (2015). Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films. In M. J. Soileau, V. E. Gruzdev, J. A. Menapace, D. Ristau, & G. J. Exarhos (Eds.), 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015 Article 963215 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9632). SPIE. https://doi.org/10.1117/12.2196548

Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films. / Xu, Yejia; Khabbazi, Amir; Day, Travis et al.
47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. ed. / M.J. Soileau; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; Gregory J. Exarhos. SPIE, 2015. 963215 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9632).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Xu, Y, Khabbazi, A, Day, T, Brown, A, Emmert, LA, Talghader, JJ, Field, E, Kletecka, D, Bellum, J, Patel, D, Menoni, CS & Rudolph, W 2015, Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films. in MJ Soileau, VE Gruzdev, JA Menapace, D Ristau & GJ Exarhos (eds), 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015., 963215, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9632, SPIE, 47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015, Boulder, United States, 9/27/15. https://doi.org/10.1117/12.2196548

Xu Y, Khabbazi A, Day T, Brown A, Emmert LA, Talghader JJ et al. Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films. In Soileau MJ, Gruzdev VE, Menapace JA, Ristau D, Exarhos GJ, editors, 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. SPIE. 2015. 963215. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2196548

Xu, Yejia ; Khabbazi, Amir ; Day, Travis et al. / Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films. 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. editor / M.J. Soileau ; Vitaly E. Gruzdev ; Joseph A. Menapace ; Detlev Ristau ; Gregory J. Exarhos. SPIE, 2015. (Proceedings of SPIE - The International Society for Optical Engineering).

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Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Abstract

Publication series

Other

Bibliographical note

Keywords

Access

OpenUrl availability

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Cite this