Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films
Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, Wolfgang Rudolph
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