Computation and measurement of electron circulation patterns in phase space

U. Kortshagen, B. Hell

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The electron fluxes in low-pressure inductively coupled plasmas (ICP) were measured and studied numerically. Numerical results were obtained with a two-dimensional plasma model which resolved the ICP structure in radial and axial direction. The electron Boltzmann equation was solved in the two-term and the effective field approximation.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Plasma Science
PublisherIEEE
Pages166
Number of pages1
StatePublished - 2000
EventICOPS 2000 - 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA
Duration: Jun 4 2000Jun 7 2000

Other

OtherICOPS 2000 - 27th IEEE International Conference on Plasma Science
CityNew Orleans, LA, USA
Period6/4/006/7/00

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