L10 ordered FePt films with (200) or (001) preferred orientations and longitudinal or perpendicular anisotropy have been prepared by dc magnetron sputtering. Different base pressures for sputtering were controlled by air feeding. The fct-FePt film exhibits (200) preferred orientation and has longitudinal anisotropy at the base pressure of 4×10-6Torr. As the base pressure is improved (below 9×10-7Torr), the fct-FePt films exhibit (001) preferred orientation and has perpendicular anisotropy. When the CrRu underlayer thickness decreases from 80 to 30 nm, an improved fct-FePt (001) orientation is obtained. The atmospheric constituents such as oxygen and nitrogen play an important role in controlling the crystallographic orientation and axis of magnetic anisotropy.
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