A commercial disk manufacturing sputter system with a unique design of a triple-target cathode for depositing multilayers was used to deposit ultra-thin Co/Pt and Co/Pd magnetic superlattices with ultra-thin Ta films as seed layers. The effects of Ni45Fe55 underlayer on the magnetic properties of superlattices were also studied. It was found that the soft underlayer has a significant effect on the magnetic properties of Co/Pt superlattices.
|Original language||English (US)|
|Journal||Digests of the Intermag Conference|
|State||Published - 2000|
|Event||2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can|
Duration: Apr 9 2000 → Apr 13 2000