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Abstract
The demonstration of SrSnO3 metal-semiconductor field effect transistors (MESFETs) is reported. The device layer structure consists a 28-nm-thick n-type SrSnO3 film on top of an 11-nm-thick undoped SrSnO3 film grown by hybrid molecular beam epitaxy on a (110) GdScO3 substrate. The MESFETs utilize a Pt Schottky gate electrode and diffused Sc Ohmic contacts. A Schottky barrier height of 1.55 eV was extracted for Pt on SrSnO3 using capacitance-voltage measurements. Devices with a gate length of 3 μ m and source-drain spacing of 9 μm had a drive current of 36 mA/mm at VGS = +1 V and VDS = +3.5 V, and a peak extrinsic (intrinsic) transconductance of 17 mS/mm (35 mS/mm).
Original language | English (US) |
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Article number | 8423108 |
Pages (from-to) | 1381-1384 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 39 |
Issue number | 9 |
DOIs | |
State | Published - Sep 2018 |
Bibliographical note
Publisher Copyright:© 1980-2012 IEEE.
Keywords
- Doping
- Logic gates
- MESFET
- MESFETs
- Molecular beam epitaxial growth
- Performance evaluation
- Perovskites
- Stannate
- Substrates
How much support was provided by MRSEC?
- Partial
Reporting period for MRSEC
- Period 5
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Dive into the research topics of 'Demonstration of a Depletion-Mode SrSnO3 n-Channel MESFET'. Together they form a unique fingerprint.-
MRSEC IRG-1: Electrostatic Control of Materials
Leighton, C., Birol, T., Fernandes, R. M., Frisbie, D., Goldman, A. M., Greven, M., Jalan, B., Koester, S. J., He, T., Jeong, J. S., Koirala, S., Paul, A., Thoutam, L. R. & Yu, G.
9/1/98 → …
Project: Research project
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