Design & characterization of a mems thermal switch

J. H. Cho, C. D. Richards, J. Jiao, D. F. Bahr, R. F. Richards

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

In this paper we present the design, fabrication, and characterization of a MEMS thermal switch. Three switch designs are considered: one in which the conductive material is in the form of liquid-metal micro droplets, one in which the conductive material consists of aligned carbon nanotube arrays, and one in which solid silicon contacts are used. The ratio of thermal resistance in the on and off conditions is used to characterize performance. Based on these measurements the switch incorporating liquid-metal droplets is superior to the other two switches. The liquid-metal switch has a thermal resistance off to on ratio of 168 and can provide heating rates of 905oC/s.

Original languageEnglish (US)
Title of host publication2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
EditorsThomas W. Kenny, Leland Spangler
PublisherTransducer Research Foundation
Pages272-275
Number of pages4
ISBN (Electronic)0964002469, 9780964002463
StatePublished - Jan 1 2006
Externally publishedYes
Event13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States
Duration: Jun 4 2006Jun 8 2006

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
CountryUnited States
CityHilton Head Island
Period6/4/066/8/06

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