@inproceedings{5a51b7cc6cf5484fb184d6864ee8bd3c,
title = "Design & characterization of a mems thermal switch",
abstract = "In this paper we present the design, fabrication, and characterization of a MEMS thermal switch. Three switch designs are considered: one in which the conductive material is in the form of liquid-metal micro droplets, one in which the conductive material consists of aligned carbon nanotube arrays, and one in which solid silicon contacts are used. The ratio of thermal resistance in the on and off conditions is used to characterize performance. Based on these measurements the switch incorporating liquid-metal droplets is superior to the other two switches. The liquid-metal switch has a thermal resistance off to on ratio of 168 and can provide heating rates of 905oC/s.",
author = "Cho, {J. H.} and Richards, {C. D.} and J. Jiao and Bahr, {D. F.} and Richards, {R. F.}",
year = "2006",
month = jan,
day = "1",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "272--275",
editor = "Kenny, {Thomas W.} and Leland Spangler",
booktitle = "2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006",
note = "13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 ; Conference date: 04-06-2006 Through 08-06-2006",
}