Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

Mengwei Liu, Jianhua Tong, Tianhong Cui, Weijie Dong, Yan Cui, Jing Wang, Liding Wang

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

The paper presented two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers. Based on the direct and converse piezoelectric effect, the two piezoelectric parts performed sensor and actuator functions respectively. The microcantilever was fabricated by silicon bulk micromachining. Lead zirconate titanate PbZr0.5Ti0.5O3(PZT) thin film was prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The film has single perovskite phase structure and (111) preferred orientation. The key micromachining processes have been optimized to enhance the property and to increase yield of the piezoelectric microcantilevers.

Original languageEnglish (US)
Pages (from-to)467-468
Number of pages2
JournalZhongguo Jixie Gongcheng/China Mechanical Engineering
Volume16
Issue numberSUPPL.
StatePublished - Jul 1 2005

Keywords

  • Microcantilever
  • PZT thin film
  • Piezoelectric, integration

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