Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

Mengwei Liu; Jianhua Tong; Tianhong Cui; Weijie Dong; Yan Cui; Jing Wang; Liding Wang

Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

Mengwei Liu, Jianhua Tong, Tianhong Cui, Weijie Dong, Yan Cui, Jing Wang, Liding Wang

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The paper presented two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers. Based on the direct and converse piezoelectric effect, the two piezoelectric parts performed sensor and actuator functions respectively. The microcantilever was fabricated by silicon bulk micromachining. Lead zirconate titanate PbZr_0.5Ti_0.5O₃(PZT) thin film was prepared by sol-gel method on Pt/Ti/SiO₂/Si substrate. The film has single perovskite phase structure and (111) preferred orientation. The key micromachining processes have been optimized to enhance the property and to increase yield of the piezoelectric microcantilevers.

Original language	English (US)
Pages (from-to)	467-468
Number of pages	2
Journal	Zhongguo Jixie Gongcheng/China Mechanical Engineering
Volume	16
Issue number	SUPPL.
State	Published - Jul 1 2005

Keywords

Microcantilever
PZT thin film
Piezoelectric, integration

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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T1 - Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

AU - Liu, Mengwei

AU - Tong, Jianhua

AU - Cui, Tianhong

AU - Dong, Weijie

AU - Cui, Yan

AU - Wang, Jing

AU - Wang, Liding

PY - 2005/7/1

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N2 - The paper presented two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers. Based on the direct and converse piezoelectric effect, the two piezoelectric parts performed sensor and actuator functions respectively. The microcantilever was fabricated by silicon bulk micromachining. Lead zirconate titanate PbZr0.5Ti0.5O3(PZT) thin film was prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The film has single perovskite phase structure and (111) preferred orientation. The key micromachining processes have been optimized to enhance the property and to increase yield of the piezoelectric microcantilevers.

AB - The paper presented two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers. Based on the direct and converse piezoelectric effect, the two piezoelectric parts performed sensor and actuator functions respectively. The microcantilever was fabricated by silicon bulk micromachining. Lead zirconate titanate PbZr0.5Ti0.5O3(PZT) thin film was prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The film has single perovskite phase structure and (111) preferred orientation. The key micromachining processes have been optimized to enhance the property and to increase yield of the piezoelectric microcantilevers.

KW - Microcantilever

KW - PZT thin film

KW - Piezoelectric, integration

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Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

Abstract

Keywords

UN SDGs

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