Designing a 40.68 MHz power-combining resonant inverter with eGaN FETs for plasma generation

Jungwon Choi, Yasuyuki Ooue, Naoki Furukawa, Juan Rivas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This paper presents the design of a 40.68 MHz, 1.2 kW power-combining resonant inverter using eGaN FETs for plasma generation. Operating at very high frequency (VHF) allows the use of smaller passive components and has the potential to improve the power density of an RF power amplifier for plasma applications. To provide high power at 40.68 MHz switching frequency, a class Phi-{2} inverter topology with wide band gap (WBG) devices such as eGaN FETs was selected. Using WBG devices in resonant inverters helps us increase switching frequencies while providing relatively higher efficiency compared to silicon devices. In contrast to using RF MOSFETS with large on-resistance and input capacitance, using eGaN FETs with lower on-resistance and input capacitance results in relatively higher efficiency of resonant inverters. However, these FETs in high-power operation cannot effectively dissipate heat at VHF. To reduce the losses in each eGaN FET, we designed and implemented the power-combining inverter based on a class Phi-{2} inverter to provide 1.2 kW output power at 40.68 MHz. The tuning method of a single class Phi-{2} inverter enables us to easily connect four inverters in parallel, creating a power-combining inverter that increases the output power. Also, the proposed inverter topology reduces the power loss in each switching device, which can decrease the size of the heat sink. This study demonstrates that power-combining resonant inverters using eGaN FETs can increase efficiency and power density while operating at 40.68 MHz.

Original languageEnglish (US)
Title of host publication2018 IEEE Energy Conversion Congress and Exposition, ECCE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1322-1327
Number of pages6
ISBN (Electronic)9781479973118
DOIs
StatePublished - Dec 3 2018
Externally publishedYes
Event10th Annual IEEE Energy Conversion Congress and Exposition, ECCE 2018 - Portland, United States
Duration: Sep 23 2018Sep 27 2018

Publication series

Name2018 IEEE Energy Conversion Congress and Exposition, ECCE 2018

Other

Other10th Annual IEEE Energy Conversion Congress and Exposition, ECCE 2018
Country/TerritoryUnited States
CityPortland
Period9/23/189/27/18

Bibliographical note

Funding Information:
The authors would like to thank Daihen for their support in this project through the support provided to the Stanford SystemX Alliance FMA (Faculty, Mentor, Advisor) Research program.

Publisher Copyright:
© 2018 IEEE.

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