Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

U. Kortshagen, H. Schlueter

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.

Original languageEnglish (US)
Pages (from-to)1585-1593
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume24
Issue number9
DOIs
StatePublished - Jan 1 1991

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