Development of 5.5-GHz band pass filter in all silicon multilayer substrate with air dielectric

Engineering & Materials Science

• Bandpass filters 70%
• Multilayers 66%
• Silicon 54%
• Substrates 48%
• Air 37%
• Inductance 25%
• Chebyshev filters 20%
• Three dimensional integrated circuits 19%
• Wimax 17%
• Natural frequencies 11%
• Topology 9%
• Bandwidth 8%

Chemical Compounds

• Inductor 100%
• Inductance 72%
• Multilayer 61%
• Dielectric Material 60%
• Volume 26%
• Application 7%

Physics & Astronomy

• bandpass filters 77%
• inductors 48%
• air 41%
• silicon 37%
• inductance 28%
• resonant frequencies 12%
• topology 12%
• Q factors 11%
• bandwidth 9%