Development of characterization methods for micromachined embedded test structures

E. Davies-Venn; T. Pan; A. Baldi; R. F. Drayton; B. Ziaie

Development of characterization methods for micromachined embedded test structures

E. Davies-Venn, T. Pan, A. Baldi, R. F. Drayton, B. Ziaie

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

Original language	English (US)
Title of host publication	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
Subtitle of host publication	Digest of Papers
Editors	J.D. Cressler, J. Papapolymerou
Pages	318-321
Number of pages	4
State	Published - 2004
Event	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers - Atlanta, GA, United States Duration: Sep 8 2004 → Sep 10 2004

Publication series

Name	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Other

Other	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers
Country/Territory	United States
City	Atlanta, GA
Period	9/8/04 → 9/10/04

Keywords

Characterization and testing
Q factor
Silicon embedded

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Davies-Venn, E., Pan, T., Baldi, A., Drayton, R. F., & Ziaie, B. (2004). Development of characterization methods for micromachined embedded test structures. In J. D. Cressler, & J. Papapolymerou (Eds.), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers (pp. 318-321). (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Development of characterization methods for micromachined embedded test structures. / Davies-Venn, E.; Pan, T.; Baldi, A. et al.
2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. ed. / J.D. Cressler; J. Papapolymerou. 2004. p. 318-321 (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Davies-Venn, E, Pan, T, Baldi, A, Drayton, RF & Ziaie, B 2004, Development of characterization methods for micromachined embedded test structures. in JD Cressler & J Papapolymerou (eds), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers, pp. 318-321, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers, Atlanta, GA, United States, 9/8/04.

Davies-Venn E, Pan T, Baldi A, Drayton RF, Ziaie B. Development of characterization methods for micromachined embedded test structures. In Cressler JD, Papapolymerou J, editors, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. 2004. p. 318-321. (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Davies-Venn, E. ; Pan, T. ; Baldi, A. et al. / Development of characterization methods for micromachined embedded test structures. 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. editor / J.D. Cressler ; J. Papapolymerou. 2004. pp. 318-321 (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

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Development of characterization methods for micromachined embedded test structures

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