Development of miniature microwave circuit components using micromachining techniques

Rhonda F. Drayton, Linda P B Katehi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

Abstract

Miniature microwave circuit components are presented that were developed using silicon micromachining techniques. Although micromachining is very well known in sensor applications, it is used, herein, for the first time in microwave applications. This paper presents the development of micromachined lines and describes the theoretical and experimental characterization of circuit components such as filters and tuning stubs.

Original languageEnglish (US)
Title of host publicationIEEE MTT-S International Microwave Symposium Digest
PublisherPubl by IEEE
Pages225-228
Number of pages4
ISBN (Print)0780317793
StatePublished - Jan 1 1994
EventProceedings of the IEEE MTT-S International Microwave Symposium - San Diego, CA, USA
Duration: May 23 1994May 27 1994

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume1
ISSN (Print)0149-645X

Other

OtherProceedings of the IEEE MTT-S International Microwave Symposium
CitySan Diego, CA, USA
Period5/23/945/27/94

Fingerprint

Dive into the research topics of 'Development of miniature microwave circuit components using micromachining techniques'. Together they form a unique fingerprint.

Cite this