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Diamond-like carbon films prepared by facing-target sputtering
J. R. Shi,
J. P. Wang
Electrical and Computer Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
19
Scopus citations
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Engineering & Materials Science
Diamond like carbon films
100%
Facings
85%
Sputtering
81%
Optical band gaps
31%
Raman spectroscopy
21%
Nanoindentation
19%
Surface morphology
17%
Spectroscopy
17%
Atoms
16%
Surface roughness
13%
Hardness
12%
Carbon
12%
Physics & Astronomy
diamonds
50%
sputtering
50%
carbon
42%
nanoindentation
16%
ellipsometry
15%
Raman spectroscopy
13%
roughness
13%
hardness
12%
Raman spectra
12%
spectroscopy
8%
atoms
8%
Chemical Compounds
Sputtering
69%
Pressure
37%
Liquid Film
30%
Carbon Atom
30%
Ellipsometry
17%
Raman Spectrum
13%
Raman Spectroscopy
12%
Band Gap
12%
Force
10%
Surface
5%