Dispersion of gas pollutant in a fan-filter-unit (FFU) cleanroom

Sheng Chieh Chen; Chuen Jinn Tsai; Shou Nan Li; Hui Ya Shih

doi:10.1016/j.buildenv.2006.02.023

Dispersion of gas pollutant in a fan-filter-unit (FFU) cleanroom

Sheng Chieh Chen, Chuen Jinn Tsai, Shou Nan Li, Hui Ya Shih

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Numerical simulation and experimental measurement of flow and concentration fields in a working fan-filter-unit (FFU) cleanroom have been conducted in this study. The purpose of the study is to find out the unsteady concentration distribution of a leaking gas pollutant. The standard K-ε model was used for the simulation of the flow field. To obtain the gas concentration field, SF₆ gas with a certain concentration was released as a simulated leaking source from a valve manifold box (VMB) for 5 or 10 min, respectively. Three Fourier transform infrared spectrometers (FTIRs) were simultaneously used to measure the spatial and temporal distributions of SF₆ concentrations. The measured data were then compared with the numerical results and the agreement is seen to be quite good. From the numerical results, the pollutant hot spots, peak pollutant concentration at the end of leaking, and time taken for the concentration to reduce to near background level are obtained.

Original language	English (US)
Pages (from-to)	1902-1912
Number of pages	11
Journal	Building and Environment
Volume	42
Issue number	5
DOIs	https://doi.org/10.1016/j.buildenv.2006.02.023
State	Published - May 2007
Externally published	Yes

Bibliographical note

Funding Information:
Authors would like to thank for the financial support of this project by the Industrial Technology Research Institute (ITRI) in Taiwan in 2004.

Keywords

Pollutant dispersion
Standard K-ε Model
Working cleanroom

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title = "Dispersion of gas pollutant in a fan-filter-unit (FFU) cleanroom",

abstract = "Numerical simulation and experimental measurement of flow and concentration fields in a working fan-filter-unit (FFU) cleanroom have been conducted in this study. The purpose of the study is to find out the unsteady concentration distribution of a leaking gas pollutant. The standard K-ε model was used for the simulation of the flow field. To obtain the gas concentration field, SF6 gas with a certain concentration was released as a simulated leaking source from a valve manifold box (VMB) for 5 or 10 min, respectively. Three Fourier transform infrared spectrometers (FTIRs) were simultaneously used to measure the spatial and temporal distributions of SF6 concentrations. The measured data were then compared with the numerical results and the agreement is seen to be quite good. From the numerical results, the pollutant hot spots, peak pollutant concentration at the end of leaking, and time taken for the concentration to reduce to near background level are obtained.",

keywords = "Pollutant dispersion, Standard K-ε Model, Working cleanroom",

author = "Chen, {Sheng Chieh} and Tsai, {Chuen Jinn} and Li, {Shou Nan} and Shih, {Hui Ya}",

note = "Funding Information: Authors would like to thank for the financial support of this project by the Industrial Technology Research Institute (ITRI) in Taiwan in 2004.",

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doi = "10.1016/j.buildenv.2006.02.023",

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AU - Chen, Sheng Chieh

AU - Tsai, Chuen Jinn

AU - Li, Shou Nan

AU - Shih, Hui Ya

N1 - Funding Information: Authors would like to thank for the financial support of this project by the Industrial Technology Research Institute (ITRI) in Taiwan in 2004.

PY - 2007/5

Y1 - 2007/5

N2 - Numerical simulation and experimental measurement of flow and concentration fields in a working fan-filter-unit (FFU) cleanroom have been conducted in this study. The purpose of the study is to find out the unsteady concentration distribution of a leaking gas pollutant. The standard K-ε model was used for the simulation of the flow field. To obtain the gas concentration field, SF6 gas with a certain concentration was released as a simulated leaking source from a valve manifold box (VMB) for 5 or 10 min, respectively. Three Fourier transform infrared spectrometers (FTIRs) were simultaneously used to measure the spatial and temporal distributions of SF6 concentrations. The measured data were then compared with the numerical results and the agreement is seen to be quite good. From the numerical results, the pollutant hot spots, peak pollutant concentration at the end of leaking, and time taken for the concentration to reduce to near background level are obtained.

AB - Numerical simulation and experimental measurement of flow and concentration fields in a working fan-filter-unit (FFU) cleanroom have been conducted in this study. The purpose of the study is to find out the unsteady concentration distribution of a leaking gas pollutant. The standard K-ε model was used for the simulation of the flow field. To obtain the gas concentration field, SF6 gas with a certain concentration was released as a simulated leaking source from a valve manifold box (VMB) for 5 or 10 min, respectively. Three Fourier transform infrared spectrometers (FTIRs) were simultaneously used to measure the spatial and temporal distributions of SF6 concentrations. The measured data were then compared with the numerical results and the agreement is seen to be quite good. From the numerical results, the pollutant hot spots, peak pollutant concentration at the end of leaking, and time taken for the concentration to reduce to near background level are obtained.

KW - Pollutant dispersion

KW - Standard K-ε Model

KW - Working cleanroom

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Dispersion of gas pollutant in a fan-filter-unit (FFU) cleanroom

Abstract

Bibliographical note

Keywords

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