TY - JOUR
T1 - Dynamics of liquid-encapsulated czochralski growth of gallium arsenide
T2 - Comparing model with experiment
AU - Thomas, P. D.
AU - Derby, J. J.
AU - Atherton, L. J.
AU - Brown, R. A.
AU - Wargo, M. J.
N1 - Funding Information:
This research was supported by the United States Defense Advanced Research Project Agency.
PY - 1989/5
Y1 - 1989/5
N2 - The dynamic thermal-capillary model developed previously [Derby, Atherton, Thomas and Brown, J. Sci. Computing 2 (1987) 297] is extended to model a low-pressure, liquid-encapsulated Czochralski system for growth of GaAs in an axial magnetic field that is strong enough that convective heat transport is unimportant. The model includes thermal conduction in all phases, a model for semi-transparent radiation through the B2O3 encapsulant and diffuse-gray radiation between the crystal, crucible and melt. Numerical simulations of seeding and growth are compared directly to experimental growth using a Hamco CG-800 puller modified for GaAs growth and equipped with a superconducting magnet capable of producing an axial magnetic field of up to 5 kG. The crystal shape predicted by the simulations is in semiquantitative agreement with the experiment. The calculations also predict optimum operating strategies for producing constant-diameter crystals, including the transients associated with seeding and shouldering the crystal.
AB - The dynamic thermal-capillary model developed previously [Derby, Atherton, Thomas and Brown, J. Sci. Computing 2 (1987) 297] is extended to model a low-pressure, liquid-encapsulated Czochralski system for growth of GaAs in an axial magnetic field that is strong enough that convective heat transport is unimportant. The model includes thermal conduction in all phases, a model for semi-transparent radiation through the B2O3 encapsulant and diffuse-gray radiation between the crystal, crucible and melt. Numerical simulations of seeding and growth are compared directly to experimental growth using a Hamco CG-800 puller modified for GaAs growth and equipped with a superconducting magnet capable of producing an axial magnetic field of up to 5 kG. The crystal shape predicted by the simulations is in semiquantitative agreement with the experiment. The calculations also predict optimum operating strategies for producing constant-diameter crystals, including the transients associated with seeding and shouldering the crystal.
UR - http://www.scopus.com/inward/record.url?scp=0024656599&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0024656599&partnerID=8YFLogxK
U2 - 10.1016/0022-0248(89)90284-4
DO - 10.1016/0022-0248(89)90284-4
M3 - Article
AN - SCOPUS:0024656599
SN - 0022-0248
VL - 96
SP - 135
EP - 152
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1
ER -