Energy distribution of ions bombarding biased electrodes in high density plasma reactors

Physics & Astronomy

• plasma density 59%
• energy distribution 54%
• reactors 47%
• electrodes 38%
• ions 28%
• radio frequencies 17%
• transformers 16%
• sheaths 10%
• analyzers 9%
• gas composition 6%
• energy 6%
• falling 5%
• gas mixtures 4%
• electrostatics 3%
• retarding 3%
• wafers 3%
• modulation 3%

Engineering & Materials Science

• Plasma density 100%
• Ions 57%
• Electrodes 47%
• Plasmas 14%
• Fluxes 8%
• Chucks 7%
• Gas mixtures 5%
• Electrostatics 5%
• Modulation 3%
• Chemical analysis 3%
• Gases 2%

Chemical Compounds

• Plasma 38%
• Behavior as Electrode 31%
• Energy 29%
• Ion 24%
• Gas 5%
• Surface 1%