Abstract
The minimum measurable voltage in the SEM is estimated for a voltage contrast linearization scheme with restricted- and unrestricted-aperture analysers, using approximations for the shapes of the energy distribution curves and assuming that the only significant source of noise is on the collected electrons. A similar estimate is also made for Auger electron voltage measurement schemes. A numerical example shows that the hemispherical retarding-potential analyser system (unrestricted aperture) provides the lowest measurable voltage.
Original language | English (US) |
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Article number | 018 |
Pages (from-to) | 911-913 |
Number of pages | 3 |
Journal | Journal of Physics E: Scientific Instruments |
Volume | 10 |
Issue number | 9 |
DOIs | |
State | Published - Dec 1 1977 |