Evaluation of a cleanroom concentration aerosol sampler

V. A. Marple, B. Y.H. Liu, Bernard A Olson

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A concentrating impactor sampler has been designed to collect airborne particles from clean rooms where particle concentrations are low. The sampler can be used to collect contaminant particles from computer disk drives, vacuum load lock chambers semiconductor processing equipment and other clean room processes. This sampler operates at 30 lpm, concentrating the particles larger than 1 micron in a virtual impactor stage into 5% of the flow and then depositing the particles in a real impactor onto a scanning electron microscope stud for analysis. Particles smaller than 1 micron are collected on a filter and are available for analysis.

Original languageEnglish (US)
Pages (from-to)360-363
Number of pages4
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
StatePublished - Dec 1 1989
Event1989 Proceedings - 35th Annual Technical Meeting: Building Tomorrow's Environment - Anaheim, CA, USA
Duration: May 1 1989May 5 1989

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