TY - JOUR
T1 - Evaluation of a cleanroom concentration aerosol sampler
AU - Marple, V. A.
AU - Liu, B. Y.H.
AU - Olson, Bernard A
PY - 1989/12/1
Y1 - 1989/12/1
N2 - A concentrating impactor sampler has been designed to collect airborne particles from clean rooms where particle concentrations are low. The sampler can be used to collect contaminant particles from computer disk drives, vacuum load lock chambers semiconductor processing equipment and other clean room processes. This sampler operates at 30 lpm, concentrating the particles larger than 1 micron in a virtual impactor stage into 5% of the flow and then depositing the particles in a real impactor onto a scanning electron microscope stud for analysis. Particles smaller than 1 micron are collected on a filter and are available for analysis.
AB - A concentrating impactor sampler has been designed to collect airborne particles from clean rooms where particle concentrations are low. The sampler can be used to collect contaminant particles from computer disk drives, vacuum load lock chambers semiconductor processing equipment and other clean room processes. This sampler operates at 30 lpm, concentrating the particles larger than 1 micron in a virtual impactor stage into 5% of the flow and then depositing the particles in a real impactor onto a scanning electron microscope stud for analysis. Particles smaller than 1 micron are collected on a filter and are available for analysis.
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M3 - Conference article
AN - SCOPUS:0024861550
SN - 0073-9227
SP - 360
EP - 363
JO - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
JF - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
T2 - 1989 Proceedings - 35th Annual Technical Meeting: Building Tomorrow's Environment
Y2 - 1 May 1989 through 5 May 1989
ER -