Experimental study of silane plasma nanoparticle formation in amorphous silicon thin films

S. Thompson, C. R. Perrey, T. J. Belich, C. Blackwell, C. B. Carter, J. Kakalios, U. Kortshagen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Experimental study of silane plasma nanoparticle formation in amorphous silicon thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds